ES Systems has developed ESRF-ESF, a MEMS gas flow sensor family, based on hot-film anemometer principle for mass gas flow measurements.
ESRF-ESF gas flow sensors feature bidirectional gas flow sensing of up to ±500 ln/min with a total error band of 1% m.v. The streamlined symmetrical body design, manufactured from high quality plastic, presents very low pressure drop even at the maximum flow in both directions. Calibration gas is air, but other non-aggressive gases are available upon request.
Operating down to 3.3V supply voltage, ESRF-ESF gas flow sensors provide calibrated and temperature compensated output on an SPI or I2C bus making them plug & play for direct interfacing to low voltage MCUs and systems. The user is provided with a multitude of options (e.g. power supply, uni/bi directionality or analog output) so that the right sensor configuration can be selected based on the specific requirements for each application.
Due to the compact design, and versatility, ESRF-ESF gas flow sensors are ideal for medical, process & pharmaceutical equipment where high accuracy and reliability are of the essence.